Title page for ETD etd-0108102-131441

Document Type	thesis
Author Name	Bergstrom, Torbjorn S
Email Address	torbjorn at wpi.edu
URN	etd-0108102-131441
Title	Investigation of Measurement Artifacts Introduced By Horizontal Scanning Surface Profiling Instruments
Degree	MS
Department	Manufacturing Engineering
Advisors	Christopher A. Brown, Advisor
Keywords	Anisotropy Scanning Instruments Scanning Surface Metrology Surface Fractal
Date of Presentation/Defense	1999-12-16
Availability	unrestricted
Abstract Horizontal scanning instruments, such as, atomic force microscopes and scanning laser microscopes, acquire three-dimensional topographic maps of surfaces, at scales ranging from tenths of nanometers to hundreds of millimeters, by measuring elevations along a series of traces scanning a region of the surface. Random and systematic errors may influence parameters calculated from these topographic maps. This work investigates anisotropic artifacts in atomic force microscope and a scanning laser microscope measurements by looking at difference between parameters calculated in the tracing and scanning directions. It is found that horizontal scanning profiling instruments systematically introduce anisotropic measurement artifacts when measuring both isotropic and anisotropic surfaces.
Files	bergstrom.pdf

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