Title page for ETD etd-1007103-133256

Document Type thesis

Author Name Steward, Victoria

URN etd-1007103-133256

Title Modeling of a folded spring supporting MEMS gyroscope

Degree MS

Department Mechanical Engineering

Advisors
Ryszard J. Pryputniewicz, Advisor
John M. Sullivan, Jr., Graduate Committee Rep
Grétar Tryggvason, Department Head
Raymond R. Hagglund, Committee Member
Cosme Furlong, Committee Member
Dimitry Grabbe, Committee Member
Howard Last, Committee Member

Keywords
MEMS
suspension
gyroscope
folded springs
statics

Date of Presentation/Defense 2003-06-20

Availability unrestricted

Abstract
Microelectromechanical systems (MEMS) are integrated mechanical and electrical devices that are fabricated with features micrometers in size. MEMS are used as chemical laboratories on a chip, actuators, sensors, etc. To increase their operational capability, various MEMS sensors are being integrated into sensor systems, whose functionality may not decrease when their size decreases. However, before more advancement can be made in the sensor systems, behavior of individual sensors must be better understood. Without the basic knowledge of how and why MEMS sensors react the way they do, it is impossible to determine how MEMS sensor systems will behave. Out of the many sensors that can be included in the system, a MEMS gyroscope was selected for consideration in this paper. More specifically, the effects that suspension has on the topography of the microgyroscopes were studied. In this thesis, the folded springs that support the MEMS gyroscopes were modeled using analytical and computational methods, whose results were verified using experimentation. The analytical results correlated well with the computational and experimental results. The analytical and computational results for the deformations of the cantilever compared within 0.1%. The differences between the analytical and experimental results were on the order of 10%. Knowledge gained from these studies will help in the development of a through methodology for modeling the microgyroscope. This methodology will facilitate insertion of the microgyroscopes into the sensor systems.

Files
StewardV.pdf

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Document Type	thesis
Author Name	Steward, Victoria
URN	etd-1007103-133256
Title	Modeling of a folded spring supporting MEMS gyroscope
Degree	MS
Department	Mechanical Engineering
Advisors	Ryszard J. Pryputniewicz, Advisor John M. Sullivan, Jr., Graduate Committee Rep Grétar Tryggvason, Department Head Raymond R. Hagglund, Committee Member Cosme Furlong, Committee Member Dimitry Grabbe, Committee Member Howard Last, Committee Member
Keywords	MEMS suspension gyroscope folded springs statics
Date of Presentation/Defense	2003-06-20
Availability	unrestricted
Abstract Microelectromechanical systems (MEMS) are integrated mechanical and electrical devices that are fabricated with features micrometers in size. MEMS are used as chemical laboratories on a chip, actuators, sensors, etc. To increase their operational capability, various MEMS sensors are being integrated into sensor systems, whose functionality may not decrease when their size decreases. However, before more advancement can be made in the sensor systems, behavior of individual sensors must be better understood. Without the basic knowledge of how and why MEMS sensors react the way they do, it is impossible to determine how MEMS sensor systems will behave. Out of the many sensors that can be included in the system, a MEMS gyroscope was selected for consideration in this paper. More specifically, the effects that suspension has on the topography of the microgyroscopes were studied. In this thesis, the folded springs that support the MEMS gyroscopes were modeled using analytical and computational methods, whose results were verified using experimentation. The analytical results correlated well with the computational and experimental results. The analytical and computational results for the deformations of the cantilever compared within 0.1%. The differences between the analytical and experimental results were on the order of 10%. Knowledge gained from these studies will help in the development of a through methodology for modeling the microgyroscope. This methodology will facilitate insertion of the microgyroscopes into the sensor systems.
Files	StewardV.pdf